Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456951 | Method and apparatus for processing inspection data | Yasuhiro Yoshitake, Kenji Oka, Masataka Shiba, Atsushi Shimoda | 2002-09-24 |
| 6404498 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected | Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2002-06-11 |
| 6400454 | Apparatus and method for inspector defects | Minori Noguchi, Yukihiro Shibata, Takanori Ninomiya | 2002-06-04 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |