Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456951 | Method and apparatus for processing inspection data | Shunji Maeda, Yasuhiro Yoshitake, Masataka Shiba, Atsushi Shimoda | 2002-09-24 |
| 6404498 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected | Shunji Maeda, Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota | 2002-06-11 |
| 6384247 | Method of producing sesamol formic acid ester and sesamol | Hiroto Tanigawa | 2002-05-07 |