Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6404498 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected | Shunji Maeda, Yasuhiko Nakayama, Minoru Yoshida, Kenji Oka | 2002-06-11 |