Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485891 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2002-11-26 |
| 6456951 | Method and apparatus for processing inspection data | Shunji Maeda, Yasuhiro Yoshitake, Kenji Oka, Atsushi Shimoda | 2002-09-24 |
| 6335146 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2002-01-01 |