Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485891 | Exposure apparatus and method | Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2002-11-26 |
| 6468817 | Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby | Shinichi Nakabayashi, Hisahiko Abe, Hirofumi Tsuchiyama, Yoshiteru Katsumura | 2002-10-22 |
| 6335146 | Exposure apparatus and method | Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2002-01-01 |