Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468817 | Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby | Hisahiko Abe, Hirofumi Tsuchiyama, Yukio Kenbo, Yoshiteru Katsumura | 2002-10-22 |