Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468817 | Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby | Shinichi Nakabayashi, Hirofumi Tsuchiyama, Yukio Kenbo, Yoshiteru Katsumura | 2002-10-22 |
| 6445025 | Semiconductor memory device and manufacturing method thereof | Kazufumi Suenaga, Kiyoshi Ogata, Kazuhiko Horikoshi, Jun Tanaka, Hisayuki Kato +1 more | 2002-09-03 |