Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485891 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2002-11-26 |
| 6411377 | Optical apparatus for defect and particle size inspection | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2002-06-25 |
| 6400454 | Apparatus and method for inspector defects | Shunji Maeda, Yukihiro Shibata, Takanori Ninomiya | 2002-06-04 |
| 6335146 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2002-01-01 |