Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411377 | Optical apparatus for defect and particle size inspection | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2002-06-25 |
| 6400454 | Apparatus and method for inspector defects | Minori Noguchi, Shunji Maeda, Yukihiro Shibata | 2002-06-04 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |
| 6355570 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Toshihiko Nakata, Sachio Uto, Hiroyuki Nakano | 2002-03-12 |