Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493082 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2002-12-10 |
| 6480279 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami | 2002-11-12 |
| 6476913 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Maki Ito | 2002-11-05 |
| 6421122 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2002-07-16 |
| 6388747 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami | 2002-05-14 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2002-04-23 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2002-04-16 |
| 6347150 | Method and system for inspecting a pattern | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada, Mari Nozoe +2 more | 2002-02-12 |
| 6335532 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2002-01-01 |