Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Mari Nozoe, Atsuko Takafuji, Kaoru Umemura +2 more | 2002-11-05 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2002-04-16 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Mari Nozoe +2 more | 2002-02-12 |
| 6335532 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Taku Ninomiya | 2002-01-01 |