Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501077 | Scanning electron microscope | Tetsuya Sawahata, Yoichi Ose | 2002-12-31 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2002-09-17 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2002-02-19 |