Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2002-09-17 |
| 6444981 | Scanning electron microscope | Sho Takami, Makoto Ezumi | 2002-09-03 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2002-02-19 |