Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493082 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2002-12-10 |
| 6480279 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi | 2002-11-12 |
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Hiroyuki Shinada, Atsuko Takafuji, Kaoru Umemura +2 more | 2002-11-05 |
| 6476913 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi, Maki Ito | 2002-11-05 |
| 6421122 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2002-07-16 |
| 6407808 | Pattern inspecting system and pattern inspecting method | Haruo Yoda | 2002-06-18 |
| 6388747 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi | 2002-05-14 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2002-04-16 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada +2 more | 2002-02-12 |