Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6407808 | Pattern inspecting system and pattern inspecting method | Mari Nozoe | 2002-06-18 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2002-04-23 |