Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Atsushi Shimoda, Kenji Obara, Yasuhiko Ozawa +4 more | 2002-11-05 |
| 6376854 | Method of inspecting a pattern on a substrate | Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2002-04-23 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada +2 more | 2002-02-12 |