Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Kenji Obara, Yasuhiko Ozawa, Hideka Bamba +4 more | 2002-11-05 |
| 6456951 | Method and apparatus for processing inspection data | Shunji Maeda, Yasuhiro Yoshitake, Kenji Oka, Masataka Shiba | 2002-09-24 |