Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6487868 | Air conditioner and method for controlling air conditioner | Shigehiro Sato, Shiho Furuya, Toshiyuki Imasaka, Eiji Nakatsuno | 2002-12-03 |
| 6465781 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Norimasa Nishimura, Akira Shimase, Asahiro Kuni, Taku Ninomiya, Hiroshi Miyai | 2002-10-15 |
| 6462924 | Power supply apparatus comprising a voltage detection circuit and method for using same | Kazuo Kato, Kenji Ogawa, Isao Ueno | 2002-10-08 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Asahiro Kuni, Maki Tanaka +8 more | 2002-04-23 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2002-04-16 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Asahiro Kuni, Hiroyuki Shinada, Mari Nozoe +2 more | 2002-02-12 |
| 6335532 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Takashi Hiroi, Hiroyuki Shinada, Taku Ninomiya | 2002-01-01 |