Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476387 | Method and apparatus for observing or processing and analyzing using a charged beam | Norimasa Nishimura, Junzou Azuma, Yuichi Hamamura, Michinobu Mizumura, Yasuhiro Koizumi +1 more | 2002-11-05 |
| 6465781 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Norimasa Nishimura, Masahiro Watanabe, Asahiro Kuni, Taku Ninomiya, Hiroshi Miyai | 2002-10-15 |
| 6344115 | Pattern forming method using charged particle beam process and charged particle beam processing system | Junzou Azuma, Yuichi Hamamura, Hidemi Koike | 2002-02-05 |