Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476387 | Method and apparatus for observing or processing and analyzing using a charged beam | Norimasa Nishimura, Akira Shimase, Junzou Azuma, Michinobu Mizumura, Yasuhiro Koizumi +1 more | 2002-11-05 |
| 6344115 | Pattern forming method using charged particle beam process and charged particle beam processing system | Junzou Azuma, Akira Shimase, Hidemi Koike | 2002-02-05 |