Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486472 | Inspecting system using electron beam and inspecting method using same | Yasuhiro Gunji, Masatsugu Kametani, Masahiro Koyama, Kenjiro Yamamoto | 2002-11-26 |
| 6465781 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Norimasa Nishimura, Akira Shimase, Masahiro Watanabe, Asahiro Kuni, Hiroshi Miyai | 2002-10-15 |
| 6335532 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada | 2002-01-01 |