Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486472 | Inspecting system using electron beam and inspecting method using same | Yasuhiro Gunji, Taku Ninomiya, Masahiro Koyama, Kenjiro Yamamoto | 2002-11-26 |
| 6379998 | Semiconductor device and method for fabricating the same | Hiroyuki Ohta, Hideo Miura, Mitsuo Usami, Munetoshi Zen, Noriaki Okamoto | 2002-04-30 |