Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Hiroyuki Shinada, Mari Nozoe, Kaoru Umemura +2 more | 2002-11-05 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |