Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Hiroyuki Shinada, Mari Nozoe, Atsuko Takafuji, Kaoru Umemura +2 more | 2002-11-05 |