Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Hiroyuki Shinada, Mari Nozoe, Atsuko Takafuji +2 more | 2002-11-05 |
| 6384411 | Ion source and mass spectrometer instrument using the same | Atsumu Hirabayashi, Minoru Sakairi, Yasuaki Takada, Hideaki Koizumi | 2002-05-07 |