Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500734 | Gas inlets for wafer processing chamber | Roger N. Anderson, David K. Carlson, Mahalingam Venkatesan, Norma Riley | 2002-12-31 |
| 6494219 | Apparatus with etchant mixing assembly for removal of unwanted electroplating deposits | Radha Nayak, Yezdi Dordi, Joseph Stevens | 2002-12-17 |
| 6436267 | Method for achieving copper fill of high aspect ratio interconnect features | Daniel Carl, Barry Chin, Liang-Yuh Chen, Robin Cheung, Peijun Ding +3 more | 2002-08-20 |