Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500734 | Gas inlets for wafer processing chamber | Peter Hey, David K. Carlson, Mahalingam Venkatesan, Norma Riley | 2002-12-31 |
| 6476362 | Lamp array for thermal processing chamber | Thomas E. Deacon, David K. Carlson, Paul B. Comita | 2002-11-05 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Dale R. DuBois, Lance A. Scudder, Paul B. Comita, Lori D. Washington +1 more | 2002-09-24 |
| 6436837 | Domed wafer reactor vessel window with reduced stress at atmospheric and above atmospheric pressures | — | 2002-08-20 |
| 6406543 | Infra-red transparent thermal reactor cover member | — | 2002-06-18 |
| 6399510 | Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates | Norma Riley, Grant D. Imper, Paul B. Comita | 2002-06-04 |