Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494959 | Process and apparatus for cleaning a silicon surface | Arkadii V. Samoilov, Dale R. DuBois, Bradley M. Curelop, David Carlson | 2002-12-17 |
| 6489241 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Lance A. Scudder, Norma Riley | 2002-12-03 |
| 6476362 | Lamp array for thermal processing chamber | Thomas E. Deacon, Roger N. Anderson, David K. Carlson | 2002-11-05 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Dale R. DuBois, Lance A. Scudder, Lori D. Washington, David K. Carlson +1 more | 2002-09-24 |
| 6399510 | Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates | Norma Riley, Roger N. Anderson, Grant D. Imper | 2002-06-04 |
| 6376387 | Method of sealing an epitaxial silicon layer on a substrate | David K. Carlson, Norma Riley, Dale R. Du Bois | 2002-04-23 |
| 6368567 | Point-of-use exhaust by-product reactor | Rekha Ranganathan, David K. Carlson, Dale R. DuBois, Hali Forstner | 2002-04-09 |
| 6366861 | Method of determining a wafer characteristic using a film thickness monitor | Ann Waldhauer, Norma Riley | 2002-04-02 |