Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494959 | Process and apparatus for cleaning a silicon surface | Arkadii V. Samoilov, Bradley M. Curelop, David Carlson, Paul B. Comita | 2002-12-17 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Lance A. Scudder, Paul B. Comita, Lori D. Washington, David K. Carlson +1 more | 2002-09-24 |
| 6368567 | Point-of-use exhaust by-product reactor | Paul B. Comita, Rekha Ranganathan, David K. Carlson, Hali Forstner | 2002-04-09 |