Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494959 | Process and apparatus for cleaning a silicon surface | Dale R. DuBois, Bradley M. Curelop, David Carlson, Paul B. Comita | 2002-12-17 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Dale R. DuBois, Lance A. Scudder, Paul B. Comita, Lori D. Washington, David K. Carlson +1 more | 2002-09-24 |
| 6342453 | Method for CVD process control for enhancing device performance | Shahab Khandan, Christopher Fulmer, Lori D. Washington, Herman Diniz, Lance A. Scudder | 2002-01-29 |