Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489241 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Paul B. Comita, Norma Riley | 2002-12-03 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Dale R. DuBois, Paul B. Comita, Lori D. Washington, David K. Carlson +1 more | 2002-09-24 |
| 6342453 | Method for CVD process control for enhancing device performance | Shahab Khandan, Christopher Fulmer, Lori D. Washington, Herman Diniz, Arkadii V. Samoilov | 2002-01-29 |