Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489241 | Apparatus and method for surface finishing a silicon film | Paul B. Comita, Lance A. Scudder, Norma Riley | 2002-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489241 | Apparatus and method for surface finishing a silicon film | Paul B. Comita, Lance A. Scudder, Norma Riley | 2002-12-03 |