Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500734 | Gas inlets for wafer processing chamber | Roger N. Anderson, Peter Hey, David K. Carlson, Mahalingam Venkatesan | 2002-12-31 |
| 6489241 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Paul B. Comita, Lance A. Scudder | 2002-12-03 |
| 6399510 | Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates | Roger N. Anderson, Grant D. Imper, Paul B. Comita | 2002-06-04 |
| 6376387 | Method of sealing an epitaxial silicon layer on a substrate | David K. Carlson, Paul B. Comita, Dale R. Du Bois | 2002-04-23 |
| 6366861 | Method of determining a wafer characteristic using a film thickness monitor | Ann Waldhauer, Paul B. Comita | 2002-04-02 |