Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489220 | Method and a system for sealing an epitaxial silicon layer on a substrate | David K. Carlson | 2002-12-03 |
| 6436194 | Method and a system for sealing an epitaxial silicon layer on a substrate | David K. Carlson | 2002-08-20 |
| 6376387 | Method of sealing an epitaxial silicon layer on a substrate | David K. Carlson, Paul B. Comita, Norma Riley | 2002-04-23 |