Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500734 | Gas inlets for wafer processing chamber | Roger N. Anderson, Peter Hey, Mahalingam Venkatesan, Norma Riley | 2002-12-31 |
| 6489220 | Method and a system for sealing an epitaxial silicon layer on a substrate | Dale R. Du Bois | 2002-12-03 |
| 6476362 | Lamp array for thermal processing chamber | Thomas E. Deacon, Roger N. Anderson, Paul B. Comita | 2002-11-05 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Dale R. DuBois, Lance A. Scudder, Paul B. Comita, Lori D. Washington +1 more | 2002-09-24 |
| 6436194 | Method and a system for sealing an epitaxial silicon layer on a substrate | Dale R. Du Bois | 2002-08-20 |
| 6376387 | Method of sealing an epitaxial silicon layer on a substrate | Paul B. Comita, Norma Riley, Dale R. Du Bois | 2002-04-23 |
| 6368567 | Point-of-use exhaust by-product reactor | Paul B. Comita, Rekha Ranganathan, Dale R. DuBois, Hali Forstner | 2002-04-09 |