Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Dale R. DuBois, Lance A. Scudder, Paul B. Comita, David K. Carlson +1 more | 2002-09-24 |
| 6342453 | Method for CVD process control for enhancing device performance | Shahab Khandan, Christopher Fulmer, Herman Diniz, Lance A. Scudder, Arkadii V. Samoilov | 2002-01-29 |