Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500734 | Gas inlets for wafer processing chamber | Roger N. Anderson, Peter Hey, David K. Carlson, Norma Riley | 2002-12-31 |
| 6402850 | Depositing polysilicon films having improved uniformity and apparatus therefor | Israel Beinglass, Christian M. Gronet | 2002-06-11 |