Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6434327 | Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature | James F. Gibbons | 2002-08-13 |
| 6410456 | Method and apparatus for insitu vapor generation | Peter A. Knoot, Gary E. Miner, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2002-06-25 |
| 6402850 | Depositing polysilicon films having improved uniformity and apparatus therefor | Israel Beinglass, Mahalingam Venkatesan | 2002-06-11 |