Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450116 | Apparatus for exposing a substrate to plasma radicals | David B. Noble, Ravi Jallepally, Nathan D'Astici, Turgut Sahin, Guangcai Xing +1 more | 2002-09-17 |
| 6410456 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Peter A. Knoot, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2002-06-25 |