Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402850 | Depositing polysilicon films having improved uniformity and apparatus therefor | Mahalingam Venkatesan, Christian M. Gronet | 2002-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402850 | Depositing polysilicon films having improved uniformity and apparatus therefor | Mahalingam Venkatesan, Christian M. Gronet | 2002-06-11 |