Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494959 | Process and apparatus for cleaning a silicon surface | Arkadii V. Samoilov, Dale R. DuBois, Bradley M. Curelop, Paul B. Comita | 2002-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494959 | Process and apparatus for cleaning a silicon surface | Arkadii V. Samoilov, Dale R. DuBois, Bradley M. Curelop, Paul B. Comita | 2002-12-17 |