Issued Patents All Time
Showing 51–75 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9121986 | Microlens array and scanning exposure device using same | Yoshio Watanabe | 2015-09-01 |
| 9086514 | Scanning exposure apparatus using microlens array | Koichi Kajiyama, Makoto Hatanaka, Toshinari Arai | 2015-07-21 |
| 9069251 | Scanning exposure apparatus using a plurality of microlens arrays with adjustable inclination | — | 2015-06-30 |
| 9063376 | Exposure device of an alignment material film | — | 2015-06-23 |
| 9054494 | Pulsed laser oscillator and method for controlling pulsed laser oscillation | Koichi Kajiyama, Tetsuya Kiguchi, Daisuke Ishii, Yoshikatsu Yanagawa, Masami Takimoto | 2015-06-09 |
| 9030646 | Exposure apparatus and photomask used therein | — | 2015-05-12 |
| 9012338 | Laser annealing method and laser annealing apparatus | Koichi Kajiyama | 2015-04-21 |
| 8999865 | Laser annealing apparatus and laser annealing method | Yuji Saito | 2015-04-07 |
| 9001425 | Microlens array and scanning exposure device using same | Makoto Hatanaka | 2015-04-07 |
| 8953146 | Exposure apparatus for improving alignment accuracy of a pattern generated by light modulating elements | Koichiro Fukaya, Tetsuo Ando | 2015-02-10 |
| 8922752 | Method and apparatus for alignment processing | Koichi Kajiyama, Toshinari Arai | 2014-12-30 |
| 8912079 | Compound semiconductor deposition method and apparatus | Motoichi Ohtsu, Takashi Yatsui, Tadashi Kawazoe, Shunsuke Yamazaki, Koichi Kajiyama +1 more | 2014-12-16 |
| 8854600 | Exposure apparatus and photomask | — | 2014-10-07 |
| 8748326 | Device and method for forming low-temperature polysilicon film | Koichi Kajiyama, Kuniyuki Hamano | 2014-06-10 |
| 8488097 | Method of and apparatus for producing liquid crystal display device | Koichi Kajiyama, Kazushige Hashimoto | 2013-07-16 |
| 8293434 | Method for forming convex pattern, exposure apparatus and photomask | Koichi Kajiyama, Kazushige Hashimoto | 2012-10-23 |
| 7396481 | Etching method of organic insulating film | Ryooji Fukuyama, Yutaka Ohmoto, Katsuya Watanabe | 2008-07-08 |
| 7122479 | Etching processing method | Yutaka Ohmoto, Ryouji Fukuyama, Mamoru Yakushiji | 2006-10-17 |
| 7026252 | Etching aftertreatment method | Ryouji Fukuyama, Mamoru Yakushiji, Yutaka Ohmoto, Katsuya Watanabe | 2006-04-11 |
| 7014787 | Etching method of organic insulating film | Ryooji Fukuyama, Yutaka Ohmoto, Katsuya Watanabe | 2006-03-21 |
| 6937296 | Flat panel display unit and method of repairing defects in its line pattern | Mikio Hongo, Masaaki Okunaka, Kaoru Yamada | 2005-08-30 |
| 6793833 | Etching method of organic insulating film | Ryooji Fukuyama, Yutaka Ohmoto, Katsuya Watanabe | 2004-09-21 |
| 6476387 | Method and apparatus for observing or processing and analyzing using a charged beam | Norimasa Nishimura, Akira Shimase, Junzou Azuma, Yuichi Hamamura, Yasuhiro Koizumi +1 more | 2002-11-05 |
| 6303932 | Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam | Yuichi Hamamura, Akira Shimase, Junzou Azuma, Norimasa Nishimura, Yasuhiro Koizumi +1 more | 2001-10-16 |
| 5952658 | Method and system for judging milling end point for use in charged particle beam milling system | Akira Shimase, Yuichi Hamamura, Junzou Azuma | 1999-09-14 |