Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10469692 | Scanning exposure device | Yuji Yoshida, Mineyuki Matsumoto, Shigeki Tanaka, Keita Katayose, Hideyuki Suzuki +1 more | 2019-11-05 |
| 9360776 | Alignment correction method for substrate to be exposed, and exposure apparatus | Yoshiaki Nomura | 2016-06-07 |
| 9304391 | Exposure apparatus using microlens array and optical member | Michinobu Mizumura | 2016-04-05 |
| 9244311 | Photo-alignment exposure method and photo-alignment exposure device | Koichi Kajiyama, Kazushige Hashimoto | 2016-01-26 |
| 9207498 | Photo-alignment exposure device and photo-alignment exposure method | Koichi Kajiyama, Kazushige Hashimoto | 2015-12-08 |
| 9207546 | Exposure method and exposure apparatus | Koichi Kajiyama | 2015-12-08 |
| 9086514 | Scanning exposure apparatus using microlens array | Koichi Kajiyama, Michinobu Mizumura, Makoto Hatanaka | 2015-07-21 |
| 8922752 | Method and apparatus for alignment processing | Koichi Kajiyama, Michinobu Mizumura | 2014-12-30 |
| 8883380 | Film exposure method | Kazushige Hashimoto | 2014-11-11 |