Issued Patents All Time
Showing 25 most recent of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8229062 | Transmission mask with differential attenuation to improve ISO-dense proximity | Hang Yip Liu, Sebastian Schmidt | 2012-07-24 |
| 7807342 | Transmission mask with differential attenuation to improve ISO-dense proximity | Hang Yip Liu, Sebastian Schmidt | 2010-10-05 |
| 7633601 | Method and related operation system for immersion lithography | Yong Huang, Chun-Chi Yu, Huan-Ting Tseng, Bo-Jou Lu | 2009-12-15 |
| 7476472 | Method for designing photomask | Ming-Feng Shieh, Chun-Chi Yu, Jian-Shin Liou | 2009-01-13 |
| 7268070 | Profile improvement method for patterning | Hui Huang, Cheng-Chung Chen, George Liu | 2007-09-11 |
| 7105255 | EUV reflection mask and lithographic process using the same | — | 2006-09-12 |
| 7074528 | Effective assist pattern for nested and isolated contacts | Jochen Schacht, Uwe Schroeder | 2006-07-11 |
| 7052808 | Transmission mask with differential attenuation to improve ISO-dense proximity | Hang Yip Liu, Sebastian Schmidt | 2006-05-30 |
| 7018788 | Phase shifting lithographic process | — | 2006-03-28 |
| 6866967 | Structure of phase shifting mask | — | 2005-03-15 |
| 6849393 | Phase shifting lithographic process | — | 2005-02-01 |
| 6844143 | Sandwich photoresist structure in photolithographic process | Vencent Chang, George Liu, Cheng-Chung Chen | 2005-01-18 |
| 6740473 | Method for shrinking critical dimension of semiconductor devices | Hui Huang | 2004-05-25 |
| 6534412 | Method for removing native oxide | — | 2003-03-18 |
| 6511891 | Method of preventing toppling of lower electrode through flush cleaning | Nathna Sun, Chuan-Fu Wang | 2003-01-28 |
| 6348287 | Multiphase phase shifting mask | — | 2002-02-19 |
| 6296974 | Method of forming a multi-layer photo mask | — | 2001-10-02 |
| 6296991 | Bi-focus exposure process | — | 2001-10-02 |
| 6296987 | Method for forming different patterns using one mask | Chien-Li Kuo | 2001-10-02 |
| 6291338 | Method of fabricating self-aligned polysilicon via plug | Jhy-Jyi Sze | 2001-09-18 |
| 6277685 | Method of forming a node contact hole on a semiconductor wafer | Jung-Chao Chiou, Chin-Hui Lee, Chuan-Fu Wang | 2001-08-21 |
| 6238825 | Mask with alternating scattering bars | — | 2001-05-29 |
| 6211875 | Display template setting method in a multimedia synchronous training system | Ming-Shing Su, Chung-Chih Lin, Chien-Hung Yang | 2001-04-03 |
| 6211868 | Editing method in a multimedia synchronous training system | Ming-Shing Su, Chung-Chih Lin, Chien-Hung Yang | 2001-04-03 |
| 6207328 | Method of forming a phase shift mask | — | 2001-03-27 |