Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043460 | Measurement method of overlay mark structure | Yu-Wei Cheng, Chun-Chi Yu | 2021-06-22 |
| 10811362 | Overlay mark structure and measurement method thereof | Yu-Wei Cheng, Chun-Chi Yu | 2020-10-20 |
| 9815082 | Surface wetting method | Jene A. Golovchenko, Aaron T. Kuan | 2017-11-14 |
| 7633601 | Method and related operation system for immersion lithography | Yong Huang, Benjamin Szu-Min Lin, Chun-Chi Yu, Huan-Ting Tseng | 2009-12-15 |