Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6187669 | Method of forming a node contact of a DRAM's memory cell | Jung-Chao Chiou | 2001-02-13 |
| 6184090 | Fabrication method for a vertical MOS transistor | — | 2001-02-06 |
| 6124162 | Method for manufacturing cylindrical lower electrode of DRAM capacitor | — | 2000-09-26 |
| 6117757 | Method of forming landing pads for bit line and node contact | Chuan-Fu Wang | 2000-09-12 |
| 6117599 | Alignment and exposure process utilizing split beam for exposure and alignment | — | 2000-09-12 |
| 6107132 | Method of manufacturing a DRAM capacitor | Chuan-Fu Wang, Jason Jenq | 2000-08-22 |
| 6100014 | Method of forming an opening in a dielectric layer through a photoresist layer with silylated sidewall spacers | Kun-Chi Lin | 2000-08-08 |
| 6081318 | Installation for fabricating double-sided photomask | — | 2000-06-27 |
| 6071653 | Method for fabricating a photomask | — | 2000-06-06 |
| 6071656 | Photolithography technique utilizing alignment marks at scribe line intersections | — | 2000-06-06 |
| 6057064 | Double-alternating phase-shifting mask | — | 2000-05-02 |
| 6048650 | Half tone phase shift mask comprising second pattern layer on backside of substrate | — | 2000-04-11 |
| 6042996 | Method of fabricating a dual damascene structure | Fang-Ching Chao | 2000-03-28 |
| 6022645 | Double-sided photomask | — | 2000-02-08 |
| 6015642 | Method for forming a photomask | — | 2000-01-18 |
| 6010807 | Phase-shifting mask for photolithography in semiconductor fabrications | — | 2000-01-04 |
| 6007950 | Structure of a phase shifting mask and method of fabricating the same | — | 1999-12-28 |
| 6004702 | Phase-shifting mask structure and method of fabricating the same | — | 1999-12-21 |
| 6004845 | Method for fabricating a crown-shaped capacitor | Der-Yuan Wu | 1999-12-21 |
| 5998260 | Method for manufacturing DRAM capacitor | — | 1999-12-07 |
| 5989997 | Method for forming dual damascene structure | Jason Jenq | 1999-11-23 |
| 5908314 | Two-step metal salicide semiconductor process | Chun-Cho Chen | 1999-06-01 |
| 5904533 | Metal salicide-CMP-metal salicide semiconductor process | — | 1999-05-18 |
| 5888865 | Method for manufacturing dram capacitor | — | 1999-03-30 |
| 5854124 | Method for opening contacts of different depths in a semiconductor wafer | — | 1998-12-29 |