Issued Patents All Time
Showing 101–125 of 176 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8313257 | Coating and developing apparatus, substrate processing method, and storage medium | Nobuaki Matsuoka, Yasushi Hayashida | 2012-11-20 |
| 8302556 | Coating and developing apparatus | Masami Akimoto, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2012-11-06 |
| 8237092 | Apparatus and method for heating substrate and coating and developing system | Tetsuo Fukuoka, Tetsuya Oda, Hiroaki Inadomi | 2012-08-07 |
| 8217777 | Vehicle environmental service system | Hiroaki Sekiyama | 2012-07-10 |
| 8127298 | Operations management apparatus of information-processing system | Takeshi Kato, Jun Okitsu, Tatsuya Saito, Yoko Shiga | 2012-02-28 |
| 8080765 | Apparatus and method for heating substrate and coating and developing system | Tetsuo Fukuoka, Tetsuya Oda, Hiroaki Inadomi | 2011-12-20 |
| 7997813 | Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Yasushi Hayashida | 2011-08-16 |
| 7955011 | Coating and developing apparatus, substrate processing method, and storage medium | Nobuaki Matsuoka, Yasushi Hayashida | 2011-06-07 |
| 7889428 | External laser light introducing device | — | 2011-02-15 |
| 7880859 | Substrate processing system and substrate processing method | Yasushi Hayashida, Yoshitaka Hara | 2011-02-01 |
| 7871211 | Coating and developing system, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Yasushi Hayashida | 2011-01-18 |
| 7864666 | Communication control apparatus, method and program thereof | Tooru ENOKI, Yasuo Inoue | 2011-01-04 |
| 7841072 | Apparatus and method of application and development | Nobuaki Matsuoka, Yasushi Hayashida, Yoshitaka Hara | 2010-11-30 |
| 7838801 | Heating apparatus, heating method, coating apparatus, and storage medium | Osamu Hirakawa, Masami Akimoto | 2010-11-23 |
| 7812285 | Apparatus and method for heating substrate and coating and developing system | Tetsuo Fukuoka, Tetsuya Oda, Hiroaki Inadomi | 2010-10-12 |
| 7797855 | Heating apparatus, and coating and developing apparatus | Tetsuo Fukuoka, Masami Akimoto, Takahiro Kitano, Yoshio Kimura, Hikaru Ito | 2010-09-21 |
| 7793609 | Coating and developing apparatus | Masami Akimoto, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2010-09-14 |
| 7789577 | Coating and developing system, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Yasushi Hayashida | 2010-09-07 |
| 7780438 | Substrate heating apparatus and method and coating and developing system | Hiroaki Inadomi | 2010-08-24 |
| 7758340 | Heating device and heating method | Masami Akimoto, Naruaki Iida, Hiroaki Inadomi | 2010-07-20 |
| 7736498 | Solution treatment apparatus and solution treatment method | Nobuaki Matsuoka, Tsunenaga Nakashima, Akira Oozono | 2010-06-15 |
| 7645713 | Substrate processing system and substrate processing method | Yasushi Hayashida, Yoshitaka Hara | 2010-01-12 |
| 7600424 | Liquid condition sensing apparatus | Hisashi Sasaki | 2009-10-13 |
| 7591601 | Coater/developer, coating/developing method, and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Yasushi Hayashida | 2009-09-22 |
| 7547614 | Solution treatment apparatus and solution treatment method | Nobuaki Matsuoka, Tsunenaga Nakashima, Akira Oozono | 2009-06-16 |