Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8524101 | Method and apparatus for manufacturing semiconductor device, and storage medium | Yuki Chiba | 2013-09-03 |
| 8492287 | Substrate processing method | — | 2013-07-23 |
| 8404596 | Plasma ashing method | Naotsugu Hoshi | 2013-03-26 |
| 8361275 | Etching apparatus | Masaru Nishino | 2013-01-29 |
| 8349085 | Substrate processing apparatus | Seiichi Takayama, Morihiro Takanashi | 2013-01-08 |
| 8282984 | Processing condition inspection and optimization method of damage recovery process, damage recovering system and storage medium | Reiko SASAHARA, Jun Tamura | 2012-10-09 |
| 8101507 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Ryuichi Asako, Gousuke Shiraishi | 2012-01-24 |
| 8026150 | Semiconductor device manufacturing method and storage medium | Reiko SASAHARA, Jun Tamura | 2011-09-27 |
| 7964511 | Plasma ashing method | Naotsugu Hoshi | 2011-06-21 |
| 7892986 | Ashing method and apparatus therefor | Eiichi Nishimura, Kumiko Yamazaki | 2011-02-22 |
| 7882800 | Ring mechanism, and plasma processing device using the ring mechanism | Akira Koshiishi, Mitsuru Hashimoto, Hideaki Tanaka, Kunihiko Hinata, Jun Ooyabu | 2011-02-08 |
| 7674393 | Etching method and apparatus | Masaru Nishino | 2010-03-09 |
| D470885 | Marking pen | — | 2003-02-25 |