Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309199 | Substrate transfer apparatus and substrate transfer method | Keita Horiuchi, Koji Maeda | 2022-04-19 |
| 8465593 | Substrate processing apparatus and gas supply method | Daisuke Hayashi | 2013-06-18 |
| 8349085 | Substrate processing apparatus | Shigeru Tahara, Seiichi Takayama | 2013-01-08 |
| 8003920 | Substrate processing apparatus | Daisuke Hayashi | 2011-08-23 |