Issued Patents All Time
Showing 26–50 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424462 | Multi-cell resonator microwave surface-wave plasma apparatus | Merritt Funk, Megan Doppel, John Entralgo, Toshihisa Nozawa | 2019-09-24 |
| 10388528 | Non-ambipolar electric pressure plasma uniformity control | Lee Chen, Zhiying Chen, Merritt Funk | 2019-08-20 |
| 10381745 | Beam forming network and base station antenna | Yang Geng, Guanxi Zhang | 2019-08-13 |
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Lee Chen, Merritt Funk, Radha Sundararajan | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Lee Chen, Barton Lane, Merritt Funk, Radha Sundararajan | 2019-07-16 |
| 10354837 | Controlling etch rate drift and particles during plasma processing | — | 2019-07-16 |
| 10333220 | Interleaved polarized multi-beam antenna | Yang Geng, Qingming Xie | 2019-06-25 |
| 10205236 | Antenna system | Xiaohui Ma | 2019-02-12 |
| 10069215 | Multi-beam antenna system and phase adjustment method for multi-beam antenna system, and dual-polarized antenna system | Qiang Wang | 2018-09-04 |
| 9992688 | Communication method and apparatus | Yan Peng, Hongrui Zhou, Jing Yang, Ni Ma | 2018-06-05 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2018-04-17 |
| 9947516 | Top dielectric quartz plate and slot antenna concept | Toshihisa Nozawa | 2018-04-17 |
| 9941126 | Microwave plasma device | Merritt Funk, Lee Chen | 2018-04-10 |
| 9934974 | Microwave plasma device | Merritt Funk, Lee Chen | 2018-04-03 |
| 9906351 | Method of communication with distributed antenna array system and array system | Ni Ma, Jing Yang, Tao Liu | 2018-02-27 |
| 9881804 | Method and system for high precision etching of substrates | Merritt Funk | 2018-01-30 |
| 9852893 | Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus | Lee Chen, Demetre J. Economou, Merritt Funk | 2017-12-26 |
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2017-10-17 |
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Lee Chen, Merritt Funk, Iwao Toshihiko, Peter L. G. Ventzek | 2017-08-08 |
| 9590320 | Electromagnetic dipole antenna | Wenxin Zhang, Qihao Xu, Hongli Peng, Zehe Zhu, Ni Ma | 2017-03-07 |
| 9431218 | Scalable and uniformity controllable diffusion plasma source | Lee Chen, Radha Sundararajan, Merritt Funk | 2016-08-30 |
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Lee Chen, Peter L. G. Ventzek, Merritt Funk, Radha Sundararajan | 2016-07-19 |
| 9396955 | Plasma tuning rods in microwave resonator processing systems | Lee Chen, Merritt Funk, Iwao Toshihiko, Peter L. G. Ventzek | 2016-07-19 |
| 9301383 | Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus | Lee Chen, Merritt Funk, Radha Sundararajan | 2016-03-29 |
| 9209032 | Electric pressure systems for control of plasma properties and uniformity | Lee Chen, Merritt Funk, Zhiying Chen | 2015-12-08 |